CAS No.: | 999-97-3 |
---|---|
Formula: | C6h19nsi2 |
EINECS: | 213-668-5 |
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HMDS has several valuable uses in surface science as it can be used as a coating material, a modification agent, or a surface passivation agent. We will discuss each of these applications in more detail below.
HMDS is used as a coating material in the semiconductor industry before applying a photoresist. When HMDS is deposited on a surface, it leaves methyl groups behind. These then bond with the OH molecules on the silicon surface and help develop a strong adhesion when a photoresist is applied.
Surface modification of certain compounds can be conducted with HMDS as it is feasible and only has ammonia as a byproduct. The most commonly modified surfaces with HMDS include silica aerogels, which are rendered hydrophobic during the process.1 The option to modify silica aerogels is necessary for areas of semiconductor and pharmaceuticals as changing their chemical properties make them more suitable for specific applications. Modifying the surface of materials can make them more compatible with surface analysis techniques such as scanning electron microscopy (SEM) and transmission electron microscopy (TEM).
Surface passivation is a chemical process conducted to increase the surface properties of a material so it better resists corrosion and contamination. When HMDS is used for surface passivation, it develops a layer that acts as a coating. This process is used after a product has been fabricated and helps produce a more robust product.
Hazard Codes | F,C,Xn |
Risk Statements | 11-20/21/22-34-52/53 |
Safety Statements | 16-26-36/37/39-45-61 |
RIDADR | UN 3286 3/PG 2 |
WGK Germany | 2 |
RTECS | JM9230000 |
F | 21 |
Autoignition Temperature | 325 °C |
Hazard Note | Flammable |
TSCA | Yes |
HS Code | 2931 90 00 |
HazardClass | 3 |
PackingGroup | II |
Hazardous Substances Data | 999-97-3(Hazardous Substances Data) |
Toxicity | LDLO i.p. in mice: 650 mg/kg (Petrarch Systems Inc. Product Information Sheets) |
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